Diagnostic Measurements In Lsi/vlsi Integrated Circuits Production

This book describes means in improving the technology of LSI/VLSI ICs production. It does so by concentrating on improvements of manufacturing yield and quality of the products by detecting weak points which should be eliminated on the way up the learning curve. The book presents a systematic approach to the problem, covering primarily methods based on the use of test patterns measurements, in both mass production and in research and development activities. The main groups of defects found in IC chips and ways to detect them using test structures are discussed in detail.

Format: Hardcover
No of Pages: 372
Imprint: World Scientific
Publication date: 19910401
Series: Advanced Series In Electrical And Computer Engineering