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Atomic Layer Deposition for Semiconductors

Atomic Layer Deposition for Semiconductors

Cheol Seong Hwang

Format: Print Book

ISBN: 9781461480532

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Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.

Publication Year: 2014
Imprint: Springer US
Format: H
Weight (Gram): 5384





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