Ulsi Front-end Technology: Covering From The First Semiconductor Paper To Cmos Finfet Technology
Format: Print Book
ISBN: 9789813222151
Tax included.
The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.
Format: Hardcover
No of Pages: 248
Imprint: World Scientific
Publication date: 20170824
