Silicon Anodization as a Structuring Technique

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.

Publication Year: 2018
Imprint: Springer Fachmedien Wiesbaden
Format: P
Weight (Gram): 4497