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Micro and Nano Fabrication

Micro and Nano Fabrication

Hans H. Gatzen

Format: Print Book

ISBN: 9783662508268

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Publication Year: 2015
Imprint: Springer Berlin Heidelberg
Format: P
Weight (Gram): 1115





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