Low Temperature Epitaxial Growth Of Semiconductors

Hariu Takahashi

Format: Print Book

ISBN: 9789971508395

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Low temperature processes for semiconductors have been recently under intensive development to fabricate controlled device structures with minute dimensions in order to achieve the highest device performance and new device functions as well as high integration density. Comprising reviews by experts long involved in the respective pioneering work, this volume makes a useful contribution toward maturing the process of low temperature epitaxy as a whole.

Format: Hardcover
No of Pages: 352
Imprint: World Scientific
Publication date: 19901201

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